发明名称 |
Method of proximity correction with relative segmentation |
摘要 |
The present invention is a method and apparatus for applying one-dimensional proximity correction to a piece of a mask pattern, by segmenting a first piece of a mask pattern with horizontal dividing lines into a plurality of segments, segmenting a second piece of said mask pattern with said horizontal dividing lines into a second plurality of segments, and applying proximity correction to a first segment from said first plurality of segments taking into consideration a second segment from said second plurality of segments.
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申请公布号 |
US6174630(B1) |
申请公布日期 |
2001.01.16 |
申请号 |
US19980034550 |
申请日期 |
1998.03.03 |
申请人 |
LSI LOGIC CORPORATION |
发明人 |
PETRANOVIC DUSAN;SCEPANOVIC RANKO;JONES EDWIN;SCHINELLA RICHARD;PASCH NICHOLAS F.;GARZA MARIO;CHAO KEITH K.;JENSEN JOHN V.;EIB NICHOLAS K. |
分类号 |
G03F1/14;G03F7/20;(IPC1-7):G03F9/00 |
主分类号 |
G03F1/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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