| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for working an ejection nozzle for a liquid jet recording head, capable of avoiding endurance failure damage to a mask plate at the time of processing an ejection nozzle of a shape tapered toward the liquid ejection side by laser beam irradiation from the mask plate side with the mask plate closely contacted on the orifice plate liquid-ejection side. SOLUTION: A mask plate 1 in which a total reflection mirror coating is applied according to the wavelength of an ultraviolet laser on the side opposite to the side on which ultraviolet laser beams A, B, C, D to be directed at the time of working an ejection nozzle 21 of a quartz substrate are incident, and the total reflection mirror coating layer is eliminated according to an ejection opening shape by etching so as to form a pattern 11 is closely contacted on the liquid ejection side of an orifice plate 2. A plurality of ultraviolet laser parallel beams are directed from the mask plate 1 side so as to provide ejection nozzles 21 of a shape tapered toward the liquid ejection side in the orifice plate 2 highly accurately.</p> |
