| 摘要 |
PROBLEM TO BE SOLVED: To make a polishing board press-contact with a polishing sheet so as to make pressurizing force on the whole processing surface of the polishing board uniform. SOLUTION: By the load of a pressurizing weight 5, a polishing board 1 is pressed to be contacted with a polishing sheet 10 on a lap surface plate 12 through a soft elastic member 4 and a spherical pressurizing member 3. The variability of pressurizing force at a pressurizing point of the pressurizing member 3 which is generated by a reason such as the polishing board 1 has warpage, is relieved by deformation of the soft elastic member 4, so that pressure applied on a processing surface can be made uniform. As pressurizing portions are spread at the pressurizing point, the influence of pressurizing state around the pressurizing point is small. Therefore, required pressurizing force can be applied on each pressurizing point to make the pressure added on the processing surface uniform. |
