| 摘要 |
PROBLEM TO BE SOLVED: To provide a table type die coater capable of carrying out precise zero point correction using the table surface to hold a substrate thereon as a standard. SOLUTION: This table type die coater T is composed of a table 5 to mount a substrate W thereon and having a prescribed flatness, a die main body 1 horizontally movable relative to the table 5 and movable up and down, a non- contact type distance measurement sensor S1 for measuring the distance from the surface of the table 5 or the surface of the substrate W to the lip tip part 1a of the die main body, and a control apparatus 3 for controlling the up and down movement degree of the die main body based on the measured value by the distance measurement sensor S1. In this die coater T, the prescribe position of the table 5 on the opposite to the lip tip part 1a is formed to be a projection having a width at widest 3 times as wide as the width of the lip and the projected part 11 is so formed as to keep the uppermost part of the projected part 11 at the same height as the surface of the table 5 and a non- contact type gap measurement sensor S2 for measuring the gap degree of the uppermost part of the projected part 11 and the lip tip part 1a is positioned on the opposite as to sandwich the projected part 11.
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