SINGLE CRYSTAL PULLING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide the subject device designed to prevent the turbulent flow of an argon gas from a flow tube. SOLUTION: This single crystal pulling device having such a scheme as to place a crucible inside a chamber to be fed with an inert gas and pull a semiconductor single crystal C from a semiconductor melt L in the crucible, has a nearly cylindrical flow tube 17 disposed above the crucible coaxially therewith and having the function to allow an inert gas to flow therethrough and guide the gas onto the surface of the melt L; wherein the flow tube 17 is disposed in such a manner that its lower end 17b is in close proximity to the surface of the melt L and chamfered as well.