| 摘要 |
PROBLEM TO BE SOLVED: To form a fine and uniform texture streak on a surface of a glass substrate for a magnetic disk by making a woven fabric tape composed of plastic fiber travel by being pressed to the glass substrate surface while supplying an abrasive grain suspension including solution having a hydroxyl group to the glass substrate surface. SOLUTION: In chemical mechanical texture work, for example, a one surface polishing work machine is used, and while supplying an abrasive grain suspension L including solution having a hydroxyl group such as a potassium hydroxide solution to the surface of a glass substrate D rotated in the arrow R direction from a nozzle N, a woven fabric tape T composed of plastic fiber is made to travel while being pressed to the glass substrate surface via a rubber roller P. At this time, the woven fabric tape T is made to travel in the inverse direction M of the rotational direction R. The glass substrate D is cleaned by blowing a cleaning liquid upon the surface of the glass substrate D just after keeping away the woven fabric tape T from the glass substrate D. |
