Measuring instrument, probe for the same, and measuring method

摘要

A body 1 placed thereon with a table 35 put thereon with an object to be measured W, and a portal frame 41 supporting both ends of rail 43 to the body through pillars 42A and 42B, the rail being placed above the table 35 and extending along a moving direction of a pair of probes 91A and 91B, are provided. A pair of sliders 51A and 51B are movably supported by the rail 43. The pair of the probes is extended downward from the sliders 51A and 51B to be abutted to the object W put on the table 35. The flexural deformation of the probes 91A and 91B is decreased due to the shorter length of the probes 91A and 91B, so that the high accurate measurement is achieved and a relative measurement is omitted.