| 摘要 |
PURPOSE: A substrate aligner is provided to prevent substrate breaking and a spot of a contact surface of a substrate by installing an alignment auxiliary pin so that the substrate is not kept at a guide pin. CONSTITUTION: The substrate aligner comprises an alignment supplementary pin(106) which is protrusively installed at end part of a table in a vertical direction to the table. The end of the table is connected to the alignment supplementary pin(106) by a cylinder(107). The alignment supplementary pin(106) is installed so as to be reciprocated by the cylinder(107) in a direction parallel with a surface of the table. A lift pin(103) is installed in a direction perpendicular to the table. |
