| 摘要 |
PURPOSE: A substrate of a TFT(Thin Film Transistor) LCD(Liquid Crystal Display) and a manufacturing method of the substrate are provided to simplify manufacturing steps. CONSTITUTION: A gate wire and a capacity maintaining electrode(28), separated from the gate wire, are built on an insulation substrate. The gate wire is comprised of a gate line(22), a gate pad(26), and a gate electrode. On the substrate, a gate isolation pattern(30) covers the gate wire(22, 24, 26) and the capacity maintaining electrode(28). A semiconductor pattern(42, 44, 46, 48) is formed on the gate isolation pattern(30). The semiconductor pattern consists of four parts; one is a contact hole part(46), containing a contact hole(36) to expose the gate pattern(26); another is a TFT(Thin Film Transistor) channel part(42) on the gate electrode(24); another part(48) is between a pixel electrode(64) and the capacity maintaining electrode(28); and the other part(44) is among a data line(82), the capacity maintaining electrode(28), and the gate line(22). An etching resistant film(50) is formed inside the semiconductor pattern(42) of the gate electrode(24). Conductive patterns(63, 66) are doped on the semiconductor pattern (42, 44, 46, 48) and the etching resistant film(50). One of the conductive layer(64) is a pixel electrode, another is a sub-data line, and the other is a sub gate pad. Between the conductive pattern(64, 66), and the semiconductor pattern(42, 44, 46, 48), a resistant contact layer(72, 74, 76, 78) is formed to reduce a contact resistance. A data line(82) defines a pixel and connects with a data pad(88) on one of the conductive layer. On another conductive layer, a drain electrode(86) is generated. A shield membrane(90) contains a contact hole(98) and is produced on the data wire(82, 84, 86, 88).
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