| 摘要 |
PURPOSE: A combination structure of a pogo pin and a block in a probe card is provided to detect a defective wafer within a short time by improving a structure of the prove card. CONSTITUTION: A panel bracket(11) of a rectangular shape or a circular shape is closely contacted with an upper face and a bottom face of a printed circuit panel(10). A horizontal control axis(12) for controlling a balance and a center pin(14) for setting and holding a position are installed in the printed circuit panel(10). A pogo pin loading hole having a pogo pin sleeve projection is formed in a block(20). The block(20) is supported by a block support plate(15) and a fixing bolt(16). A spring is inserted into a center portion of a sleeve. A pogo pin(30) is combined with the block(20). The pogo pin(30) is formed by combination of the sleeve, the spring, and two rods formed on both ends of the sleeve.
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