发明名称 EXHAUSTER OF PLASMA DISPLAY PANEL
摘要 PURPOSE: An exhauster of a plasma display panel is provided to reduce a process time and cost in an exhausting and sealing processes so as to improve the productivity of a plasma display panel. CONSTITUTION: Four exhaust pipes(410) of a panel(430) are directly connected to a vacuum pump and a discharge gas device through a vacuum pump port(440) and a discharge gas injection port(450). A high-temperature vacuum exhaust furnace(420) can endure a high temperature with the exhaust pipes(410) of the panel(430) open. During the exhaust process, the vacuum pump exhausts impure gas inside the plurality of panels arranged in the high-temperature vacuum exhaust furnace(420). Next, the discharge gas is injected into the high-temperature vacuum exhaust furnace(420) through the discharge gas injection port(450) when the temperature reaches the normal temperature. The sealing process is to seal the exhaust pipes(410) by applying an electric power to two hot plates when the injection of the discharge gas is completed.
申请公布号 KR20010004232(A) 申请公布日期 2001.01.15
申请号 KR19990024855 申请日期 1999.06.28
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LIM, GYU HWAN
分类号 H01J11/54;H01J11/48;(IPC1-7):H01J17/49 主分类号 H01J11/54
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