发明名称 METHOD FOR MANUFACTURING METAL STRUCTURE
摘要 PURPOSE: A method for manufacturing a metal structure is provided to prevent an adhered portion between an electrically-plated metal layer and a substrate from being separated, by improving an adhesion between the substrate and the metal layer, and by forming a fine metal structure. CONSTITUTION: A photoresist resin(200) is formed on a substrate(100). A photoresist glass(300) patterned as a predetermined shape is adhered on the photoresist resin. Ultraviolet rays are irradiated to the photoresist resin adhered on the photoresist resin to perform an exposure regarding the photoresist resin with the patterned photoresist glass. The photoresist resin is eliminated. A metal pattern is formed in a portion in which the photoresist resin is eliminated.
申请公布号 KR20010003324(A) 申请公布日期 2001.01.15
申请号 KR19990023572 申请日期 1999.06.22
申请人 LG ELECTRONICS INC. 发明人 CHO, SU JE
分类号 H01L21/283;(IPC1-7):H01L21/283 主分类号 H01L21/283
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