| 摘要 |
PURPOSE: A scrubber system of a semiconductor manufacturing equipment is provided to prevent unnecessary power consumption and to improve reliability without generating secondary harmful gas, by transforming exhaust gas from the equipment into a stable state by an ionization process using a short pulse power. CONSTITUTION: A scrubber system(20) of a semiconductor manufacturing equipment comprises a housing(22), an inducing unit, an exhaust unit, an anode/cathode electrode terminal, a cathode electrode tube(27), an anode electrode tube(28) and an insulating tube. The housing is a closed space, of which the inside is divided. In the inducing unit, a pipe that induces an exhaust gas flow from the semiconductor manufacturing equipment is connected to one side of the housing. In the exhaust unit, another pipe coupled to an exhaust duct is connected to the other side of the housing. The anode/cathode electrode terminal is fixedly established by penetrating a side portion of the housing, connected to a short pulse power generator(24a) of the outside. The cathode electrode tube is fixed inside the housing, having a hole forming a flow path of the exhaust gas in a predetermined portion on its upper part. The anode electrode tube is fixed to the anode electrode terminal extended through the hole of the cathode electrode tube, established on an inner wall of the cathode electrode tube by a predetermined interval. The insulating tube is connected to the exhaust unit, corresponding to an inner wall of the anode electrode tube by a predetermined interval.
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