| 摘要 |
PURPOSE: A semiconductor fabricating equipment with a wafer mapping check system, and a method of checking a wafer mapping are provided to inform a user of a fact that a wafer mapping result performed in a process equipment is disagreed with a wafer mapping data in a system. CONSTITUTION: The device and method comprise an automation system(100) having data of a wafer mapping to be supplied to a semiconductor fabricating process and performing whole controlling operations; a robot system(120) connected with the automation system(100) and conveying a wafer; a process equipment(110) for performing a mapping operation with respect to a wafer conveyed from a robot system(120); and a wafer mapping check portion for comparing a wafer mapping result performed in the process equipment(110) with data from the automation system(100) and informing to a user if the wafer mapping result performed in the process equipment(110) is disagreed with the wafer mapping data. In the equipment, the wafer mapping check portion comprises the first counter(131) for showing the wafer mapping data from the automation system(100), the second counter(132) for showing the wafer mapping data from the processor equipment(110), and a comparator(133) for comparing counted values of the first(131) and second counter(132).
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