| 摘要 |
PURPOSE: A robot transfer device of a boat for loading a semiconductor wafer is provided to transfer safely a wafer by preventing a releasing phenomenon of a fixing bolt for fixing an upper guide member of a robot transfer device. CONSTITUTION: An upper guide member(30) has two fixing bolts(24) and four auxiliary fixing bolts(32) passing a fixing portion(30a). The upper guide member(30) is fixed to a lifter frame(10) by the fixing bolts(24) and the auxiliary fixing bolts(32) passing the fixing portion(30a). An arm(22) can be accurately moved since sliding positions of the upper guide member(30) and a lower guide member(18) are fixed. In addition, damages of a wafer and a boat are reduced in a transferring process of a boat by preventing a spreading phenomenon of the arm(22) and a releasing phenomenon of the fixing bolts(24).
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