| 摘要 |
PURPOSE: A method of removing a sacrificial layer of a micro working-element is to remove the sacrificial layer as fast as possible, thereby decreasing a manufacturing cost in a mass production. CONSTITUTION: A method of removing a sacrificial layer of a micro working-element comprises the steps of: forming sequentially a lower electrode, the sacrificial layer, a membrane and an upper electrode on a substrate with a predetermined pattern; exposing a part of the sacrificial layer by removing the upper electrode and the membrane in a predetermined area; forming the first metal for electrically connecting to the exposed sacrificial layer; immersing the substrate having the sacrificial layer in an acid solution; and removing the sacrificial and the first electrode for by contacting the first metal with a second metal. The sacrificial layer is Al, and the first metal is Cr. The second metal is selected from the one of Al, Zn and Ti.
|
