METHOD FOR MANUFACTURING A CAPACITOR CAPABLE OF REDUCING A LEAKAGE CURRENT

摘要

PURPOSE: A method for manufacturing a capacitor is provided to reduce a leakage current without loss of capacitance, by a complex oxide dielectric and a lower electrode in a process while securing a sufficient capacitance. CONSTITUTION: A polysilicon layer is formed on a substrate(1). A Ti layer and an Al layer are sequentially formed on the entire structure. A Ti silicide lower electrode composed of a part of the Ti layer is formed on the polysilicon layer by performing a thermal process in an oxygen atmosphere while the Ti layer not forming the Ti silicide layer and the Al layer are transformed into a complex dielectric layer including Ti, Al and O elements. An upper electrode is formed on the complex dielectric layer.