ELIMINATION METHOD OF CONTAMINATIONS BY ECOB METHOD UNDER LNJC OR SQUAN CONDITION

摘要

PURPOSE: Elimination method of contaminations is provided which places a detonating train to do delay explosion under LNJC(Liquid Nitrogen Jet Cleaning) or SQUAN(Special Equipped space Under Atmosphere) condition so that it effectively eliminates contaminations. CONSTITUTION: The elimination method of contaminations is performed by LNJC or SQUAN condition wherein the former condition is created by spraying liquid nitrogen to make freezing state around -160deg.C to raise hardness and brittleness of the contaminations and the latter one is created by placing a cut-off partition to cut off air in the detonating train at both edges and filling up high pressure nitrogen gas to push the air away.