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发明名称
Magnetfeldunterstützte Zerstäubungsanordnung und Vakuumbehandlungsanlage hiermit.
摘要
申请公布号
CH690805(A5)
申请公布日期
2001.01.15
申请号
CH19930001362
申请日期
1993.05.04
申请人
UNAXIS BALZERS AKTIENGESELLSCHAFT
发明人
SCHERTLER, ROMAN;HAAG, WALTER, DIPL.-ING.;KOHLER, PETER
分类号
C23C14/35;H01J37/34;(IPC1-7):H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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