| 摘要 |
<p>PURPOSE: A method for solving a problem when producing a queue of an auto guide vehicle in a diffusing process is to check a mode of a furnace equipment in an intra-bay server, thereby preventing the erroneous queue production of the auto guide vehicle. CONSTITUTION: A method for solving a problem when producing a queue of an auto guide vehicle in a diffusing process to fabricate a semiconductor comprises the steps of: transmitting a conveying requirement of a lot, of which a process in a furnace equipment is completed, to an equipment server, and transmitting withdrawal queue information from the equipment server; receiving the withdrawal queue information in an intra-bay server, and deciding whether the furnace equipment is a full auto mode or not, and directly withdrawing a cassette including the lot by an operator if the furnace equipment is not a full auto mode, and producing a withdrawal queue in an auto guide vehicle controlling server receiving the withdrawal queue information from the equipment server if the withdrawal queue information from the equipment serve; withdrawing the cassette by an auto guide vehicle receiving an order from the auto guide vehicle controlling server, and then storing the cassette in a stoker; and eliminating a furnace controlling file in the equipment server, and renewing a position information of the cassette.</p> |
