| 摘要 |
PURPOSE: A micro gyroscope is provided to offer a stable resonance to a micro gyroscope by easily diminishing a voltage applied to a vibrant COAM drive mounted at external frame of a micro gyro through asymmetry COAM detectors. CONSTITUTION: A micro gyroscope includes an inner frame(110) vibrantly mounted in the inner direction of an external frame(120), a plurality of COAMs(150) horizontally installed at inner both sides of the inner frame and mounted in the sensing direction, a sensing direction sensing electrode(170) disposed between the COAMs at a predetermined gap for being fixed and supported at the upper and lower electrodes support units(140)(160), a beam elastic member(130) mounted vibrantly in the sensing direction between the inner frame and the external frame, COAM detectors(270)(270') perceiving the vibrating status from the difference of an electrostatic capacity, an elastic body(230) vibrantly mounted at a substantial corner of the external frame, and vibrant COAM drives(250)(250') mounted at the upper and lower portions of the external frame and vibrating the upper and lower external frames by an applied voltage.
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