METHOD FOR FORMING SOG IN MANUFACTURING PROCESS OF SEMICONDUCTOR

摘要

PURPOSE: A method for forming an SOG(Spin On Glass) in a manufacturing process of a semiconductor is provided to reduce a time necessary for an over-process of an SOG. CONSTITUTION: A method for forming an SOG in a manufacturing process of a semiconductor comprises the following steps. The method separates a furnace process from a coating process. A wafer is loaded on a spinner(15) and an SOG is applied thereon. A rinsing process is performed. A bake process is performed continuously within a bake plate(17) according to each step. In the bake process, a hard bake process is performed according to the number of wafer provided to a boat(21) independently of a coating process.