TANGLE PREVENTION DEVICE FOR VACUUM HOSE BONDED TO ROBOT ARM

摘要

PURPOSE: A tangle prevention device for a vacuum hose bonded to a robot arm is provided to prevent a tangle or a twist of a vacuum hose by movement of a robot arm while the tensile force or the restoring force by a load of a weight hung from vacuum hose spread out the vacuum hose. CONSTITUTION: A tangle prevention device comprises; a robot arm(60) which transfers a wafer; a vacuum hose(10) bonded to robot arm supplies a vacuum to attach the wafer; and a weight(21) hung from the middle of the vacuum hose lengthens and spreads the vacuum hose lengthwise by a load of the weight so that a tangle of the vacuum hose by the movement of the robot arm is prevented. The weight is bonded to a guide rail(30) and is lifted along the guide rail. One end of the vacuum hose is connected to the robot arm, and the other end is connected to a vacuum intake(50).