| 摘要 |
PURPOSE: A wafer carrier membrane is provided to eliminate an unbalance phenomenon of polishing between the center portion and the circumferential portion of a wafer, by uniformly distributing air pressure applied to the wafer. CONSTITUTION: A wafer carrier membrane comprises a cylindrical main body and an air pressure distributing unit. The cylindrical main body contacts a back side of a wafer, and has a diameter corresponding to the diameter of the wafer. The air pressure distributing unit is established on a bottom surface of the cylindrical main body and uniformly distributes air pressure applied to the wafer, preventing the cylindrical main body from expanding to a flat zone.
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