| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a highly reliable thin film magnetic head by minimizing generation of an angle due to re-adhesion of a soft magnetic thin film when forming a magnetic core by etching a soft magnetic metal thin film. SOLUTION: In a method of manufacturing a thin film magnetic head including a process to form a soft magnetic thin film on a thin film coil and to form magnetic cores 3, 8 with the mask formation on such a soft magnetic thin film and etching process of the soft magnetic thin film, generation of angle due to re-adhesion of soft magnetic thin film to the mask during the etching process can be controlled. Particularly, the mask is formed by forming a photoresist 11 to the region where the mask forming surface is higher from the base substrate of the thin film coil among the mask forming region and then coating the photoresist 11 to the entire part of the mask forming region.
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