| 摘要 |
PROBLEM TO BE SOLVED: To inspect an LSI by a small number of test units even when the number of LSIs to the inspected simultaneously is increased by providing a test unit having a function by which test data is given at a time to a plurality of LSIs to be inspected simultaneously, by which an inspection result is judged in a time-sharing manner and by which inspection information is displayed or held. SOLUTION: A host computer 111, a system controller 113, a test unit 112 and an inspection board 200 constitute an LSI inspection apparatus 110. The test unit 112 sets input/output control means 212 to 262 on the side of (n) pieces of LSIs 210 to 260 so that test data can be input to the LSIs. After that, the test data is given simultaneously to the (n) pieces of LSIs, and an inspection is started. After the inspection is finished, the input/output control means 212 to 262 are set on the side of the test unit at a timing which is set in advance at response-timing generation means 211 to 261, an inspection result or the like is returned to the test unit 112 in a time-sharing manner for every LSI, and a judgment result is controlled collectively by the computer 111.
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