| 摘要 |
PROBLEM TO BE SOLVED: To reduce in size an apparatus, to accelerate a measurement and to simultaneously automatically measure a refractive index and a thickness of an article to be measured accurately by providing an interference light generating means for interfering a signal light with a reference light to generate an interference light. SOLUTION: A beam splitter 2 (an optical path dividing means) spatially separates a low coherence light irradiated from a light source 1 and collimated by a collimate lens 1a into an inspecting light and a reference light, and divides into two optical paths. An objective condensing lens 9 condenses the inspecting light, irradiates an object 10 to be measured. An object-to-be-measured drive means 11a holds the object 10 and moves it in an optical axis direction of the inspecting light. An objective condenser lens drive means 11b holds the objective condenser lens 9, and moves the lens 9 in the optical axis direction of the inspecting light. A reference light optical path regulating means regulates a length of the optical path of the reference light. A phase modulating means phase-modulates the reference light. A reference light generating means interfers the phase-modulated reference light with the signal light to generate an interference light. A photodetecting element 13 detects an intensity of the interference light.
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