发明名称 |
Optical converter for changing uniform energy wavefront into variable energy wavefront, used, e.g., for semiconductor material crystallization includes zone mask with regions of differing optical transmission |
摘要 |
The converter comprises a mask (1) with zones (2) of variable width having a first optical transmission coefficient interposed with zones having a second optical transmission coefficient. The converter employs aluminum, chromium, or a thick or a thin layer of silicon.
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申请公布号 |
FR2796167(A1) |
申请公布日期 |
2001.01.12 |
申请号 |
FR19990008706 |
申请日期 |
1999.07.06 |
申请人 |
THOMSON CSF |
发明人 |
COLLET CHRISTIAN;LEGAGNEUX PIERRE;LEHUREAU JEAN CLAUDE;PRIBAT DIDIER |
分类号 |
C30B1/02;C30B13/00;C30B13/24;G02B27/09;(IPC1-7):G02B27/46 |
主分类号 |
C30B1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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