| 摘要 |
PROBLEM TO BE SOLVED: To provide an energy-saving type heater with a long service life heating element for realizing a short heating time with a short heating treatment cycle, and high quality treatment. SOLUTION: A heater includes a cylindrical inner tube 8, made of a chemically and thermally stable material and is mounted upright, so as to surround a space in which a heating object to be treated is stored, an outer tube 9 made of the chemically and thermally stable material and mounted upright for surrounding the inner tube 8 and its inside space kept airtight, and heaters 12 and 13 for heating the inside space of the outer tube 9 and the inner tube 8. In this case, a vacuum space 3 for surrounding the outer tube 9 is formed, while the heaters 12 and 13 around the outer tube 9 are provided in the vacuum space 3.
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