| 摘要 |
PROBLEM TO BE SOLVED: To safely execute work by manually operating a device constitution unit through the use of an operation means in a substrate processor. SOLUTION: In a substrate processor, the operations of device constitution units 2 to 6 and 20 are manually operated by using an operation unit 10 connected to the processor. A manual operation by the operation unit 10 can be executed at plural operation positions SPA, SPB, SPC and SPD. Operation permission ranges where the manual operation is permitted by the operation unit 10 are decided for the respective operation positions SPA to SPB. In the manual operations by the operation unit 10 from the respective operation positions SPA to SPD, only the operation in the operation permission ranges can be executed and the operation beyond the operation permission ranges is inhibited. |
