发明名称 ANGULAR VELOCITY SENSOR
摘要 PROBLEM TO BE SOLVED: To provide an angular velocity sensor which has stable characteristics including a superior noise characteristic and temperature characteristic, can make frequency adjustment by grinding a vibrator without deteriorating the characteristics, and can be reduced in thickness. SOLUTION: An angular velocity sensor 16 is constituted in such a way that a quadrangular prism-like vibrator 8 is housed in an enclosure 5 having a top lid 3 and a bottom lid 4 with the longitudinal direction of the vibrator 8 in parallel with the longitudinal direction of the enclosure 5 and sensing elements 6 for drive and detection are attached to one side face or two facing side faces of the vibrator 8. The sensing element attaching surface of the vibrator 8 crosses the top and bottom faces of the enclosure 5 at right angles.
申请公布号 JP2001004380(A) 申请公布日期 2001.01.12
申请号 JP19990174860 申请日期 1999.06.22
申请人 SONY CORP 发明人 TAKAHASHI TOSHINORI
分类号 H01L41/08;G01C19/56;G01P9/04 主分类号 H01L41/08
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