| 摘要 |
<p>PROBLEM TO BE SOLVED: To assure an even temperature distribution over the entire substrate for stable film-forming and its growth by providing a metal foil held between a holder and a substrate as well as a presser bracket which, with a metal foil held between the holder and substrate, presses the substrate to the holder. SOLUTION: A holder 9 comprises a metal holder 1, a metal foil 2 vapor- deposited on the surface of the metal holder 1, a washer 3 of a substrate presser jig, and screw 4. The substrate is pressed to the metal foil 2 by a jig comprising the screw 4 and washer 3. The metal foil 2 has a good drawing characteristics with no work hardening for improved adhesion to the substrate surface while a high thermal contact is assured, providing no chance for melting of the metal foil. Thus, contamination on the substrate surface is prevented while the contamination on the thin-film under growth is prevented, reducing the cost for molten metal and consumable agent of silver paste as well as processes related to mounting and dismounting operation for the substrate.</p> |
