| 摘要 |
PROBLEM TO BE SOLVED: To provide the seating mechanism of a touch signal probe for highly precisely correcting any seating deviation error accompanied by a restoring operation. SOLUTION: This mechanism is provided with a fixed element 31, a movable element 41, a hard sphere 34 arranged on the fixed element, a cylindrical body 44 arranged on the movable element so as to be butted to the hard sphere 34, and a piezoelectric element 33 for allowing the hard sphere 34 and the cylindrical body 44 to relatively slide. The outer peripheral face of the cylinder 44 is shaped like a conical face so that the positions of the contact point of the cylindrical body 44 side and the contact point of the hard sphere 34 side can be changed while they are allowed to relatively slide.
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