| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor exhibiting stabilized characteristics against external temperature variation inexpensively with high productivity. SOLUTION: A silicon substrate 13 provided with a diaphragm 11, and a silicon substrate 15 provided with a fixed electrode oppositely to the diaphragm 11 constitute a sensor chip 26. The sensor chip 26 is bonded to a base 17 having a through hole 31 and covered with a cap 20 having a sub-diaphragm 29. A protrusion 30 on the sub-diaphragm 29 is brought into contact with the diaphragm 11.
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