| 摘要 |
PROBLEM TO BE SOLVED: To easily control temperature, easily realize uniform temperature distribution, and provide a thin, lightweight heater by installing a heating element having an area resistivity of less than a specified value on the surface or the inside of a ceramic substrate made of nitride ceramic or carbide ceramic. SOLUTION: A heating element having an area resistivity (r) of less than 50 mΩ/(square), preferably less than 1-45 mΩ/(square) is installed on the surface or the inside of a ceramic substrate. When the width of the heating element is represented by I, thickness by (d), length by L, a resistance value by R, and a volume resistivity byρ, the area resistivity (r) is represented by the expression r=(ρ/d)-I×(R/L). The heating element is preferably formed by baking conductive paste containing metal particles and at least one metal oxide of 0.1 wt.% or more but less than 10 wt.% based on the weight of the metal particles, selected from the group comprising lead oxide, zinc oxide, silicon oxide, boron oxide, aluminum oxide, yttrium oxide, and titanium oxide, so as to have a flat cross section.
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