| 摘要 |
PROBLEM TO BE SOLVED: To make a chemical tank which is exchangeable with another tank, without interrupting the treatment of a substrate to be treated. SOLUTION: An auxiliary pipeline 46 is provided so as to by-pass a main pipeline 45 between first to third developing solution tanks 31, 32, and 33 and a buffer tank 34, and at exchanging of the tanks 31, 32, and 33 with each other, the developing solution in a spare tank 35 is supplied to developing sections 5 and 6 by supplying N2 gas to the spare tank 35 via the auxiliary pipeline 46 by switching a first change-over switch 41 installed to the main pipeline 45 from a communicating position to an interrupting position and a second change-over valve 47 connected to the auxiliary pipeline 46 from an interrupting position to a communicating position. As a result, the exchanging work of the developing tanks 31, 32, and 33 can be carried out without having to stop facilities. |
