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发明名称
Treatment method in glow-discharge plasma and apparatus thereof
摘要
申请公布号
AU728494(B2)
申请公布日期
2001.01.11
申请号
AU19970023599
申请日期
1997.05.23
申请人
SEKISUI CHEMICAL CO., LTD.
发明人
MOTOKAZU YUASA;TAKUYA YARA
分类号
H01J37/32;(IPC1-7):C23C14/00
主分类号
H01J37/32
代理机构
代理人
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地址
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