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发明名称
Verfahren zur Herstellung integrierter Schaltkreise unter Verwendung einer Öffnung mit variabler Transmission
摘要
申请公布号
DE69900003(T2)
申请公布日期
2001.01.11
申请号
DE19996000003T
申请日期
1999.02.09
申请人
LUCENT TECHNOLOGIES INC., MURRAY HILL
发明人
CIRELLI, RAYMOND ANDREW;MKRTCHYAN, MASIS;TRIMBLE, LEE EDWARD;WATSON, GEORGE PATRICK;WINDT, DAVID LEE
分类号
H01L21/027;G03F7/20;(IPC1-7):G03F7/20
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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