SOFT MAGNETIC FILM, ITS MANUFACTURE, AND THIN FILM MAGNETIC HEAD USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a soft magnetic film and its manufacturing method which can increase especially the saturation magnetic flux density of NiFe alloy and at the same time can decrease the coercive force Hc, and a thin film magnetic head which can cope with high packing density and high recording frequency by applying the soft magnetic film to a core layer. SOLUTION: By forming an Ni-Fe alloy by an electroplating method using a pulse current, the mean crystal grain diameter of the Ni-Fe alloy film can be made 105Åor smaller, and the composition ratio of Fe can be set in the range from 60 wt.% to 75 wt.%. The Ni-Fe alloy film formed by the above plating has high saturation magnetic flux density and low resistivity. By using the Ni-Fe alloy film as a lower core layer 5 and/or an upper core layer 10, a thin film magnetic head capable of coping with high packing density can be formed.