发明名称 METHOD AND APPARATUS FOR SIMULTANEOUSLY DEPOSITING AND OBSERVING MATERIALS ON A TARGET
摘要 A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field and the first and second beams, into a third beam directed along a third axis.
申请公布号 WO0103155(A1) 申请公布日期 2001.01.11
申请号 WO2000US18074 申请日期 2000.06.30
申请人 MAUCK, MICHAEL 发明人 MAUCK, MICHAEL
分类号 G21K1/00;C23C14/54;G21K1/093;G21K5/04;H01J3/07;H01J37/04;H01J37/147;H01J37/153;H01J37/21;H01J37/30;H01J37/317;H01L21/027;(IPC1-7):H01J3/07;H01J49/20;G21K1/08 主分类号 G21K1/00
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