Calibratable measurement system for determining electrical properties of high frequency stimulated gas discharges has single calibration before measurement to adapt probes to system

摘要

The measurement system picks up two measurement signals near the RF gas discharge supplied with a RF power of a defined RF frequency by an RF generator and a matching device. A single calibration is conducted prior to the measurement to adapt the probes that supply both measurement signals to the measurement system. An Independent claim is also included for a method of determining the electrical characteristics of HF gas discharges.