Arrangement for generating low temperature plasma with corona discharge supported by magnetic field uses pulsed voltages with frequency below 100 kHz between electrodes, cathodes

摘要

The arrangement has a discharge chamber, high permeability cathodes (11), at least two low magnetic permeability low frequency electrodes (12,16) isolated from the cathodes and from each other and containing. permanent magnets (13,15), whereby the cathodes generate magnetic fields in the discharge chamber with the permanent magnets. Pulsed voltages with a frequency lower than 100 kHz are stimulated between the individual electrodes and the cathodes to produce discharges. The pulse shape and phase angle are designed so that at least one low frequency electrode is always at cathode potential whilst at least one other is at the discharge-inducing positive potential wrt the cathodes.