| 摘要 |
PURPOSE: An apparatus for measuring a pressure of a pump in a semiconductor wafer depositor is provided to detect the difference between pressures within a pump exhaust tube by installing a pressure gauge between a check valve of a pump exhaust tube and a scrubber. CONSTITUTION: An inflow tube(13) and an opening/shutting solenoid value(11) are used for providing a nitrogen gas into a dry pump(10). A cylenser(30), an opening/shutting silencer(31), and an exhaust tube(32) are formed at a pump exhaust hole(12) of the dry pump(10). A scrubber(40) is installed in one end portion of the exhaust tube(32). A check value(31) is connected with the scrubber(40) by the exhaust tube(32). An exhaust pressure detection portion(50) is used for detecting a variation of pressure of the exhaust tube(32). A pressure control portion(C) is installed among the inflow tube(13), the pump exhaust hole(12), and a controller(20) in order to control a pressure of the nitrogen gas. The controller(20) is used for controlling the solenoid valve, the pressure control portion(C), and the exhaust pressure detection portion(50).
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