METHOD FOR PRODUCING A THIN MEMBRANE AND RESULTING STRUCTURE WITH MEMBRANE

摘要

The invention concerns a method for producing a thin membrane, comprising the following steps which consist in: implanting gaseous species through a surface of a first substrate (10) and through a surface of a second substrate (20) for generating in said substrates microcavities (11, 21) delimiting for each substrate a thin layer (13, 23) sandwiched between said microcavities and the implanted surface, the microcavities being capable of causing, after they have been implanted, the thin layer to be detached from its substrate; assembling the first substrate (10) on the second substrate (20) such that their implanted surfaces are opposite each other; detaching each thin layer (13, 23) from its substrate (10, 20), the thin layers remaining assembled together to provide said thin membrane. The invention also concerns a structure with a thin membrane obtained by said method.