SEMICONDUCTOR MANUFACTURE EQUIPMENT, AND METHOD AND APPARATUS FOR SEMICONDUCTOR MANUFACTURE

摘要

Semiconductor manufacture equipment is provided in which the thermal load in a clean room (1) is decreased to reduce energy consumption. An apparatus (12) for semiconductor manufacture that dissipates heat during operation is enclosed in a case (11) and placed in a clean room (1). In the clean room (1), air can enter the case (11) and leave through exhaust ports (24, 25). The case (11) includes a heat insulator (4) to prevent the heat transfer from the case (11) to the air in the clean room. Alternatively, between the case (11) and the apparatus (12) is defined a sealed space, into which air is introduced from the outside of the clean room (1) through an intake port (71) provided in the case (11).