| 发明名称 |
SEMICONDUCTOR GAS HUMIDITY SENSOR |
| 摘要 |
gas analysis. SUBSTANCE: gas humidity sensor has semiconductor base with metal electrodes applied on its surface. Base is made of polycrystalline film of zinc selenide alloyed by gallium arsenide. EFFECT: higher sensitivity. 3 dwg
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| 申请公布号 |
RU2161794(C2) |
申请公布日期 |
2001.01.10 |
| 申请号 |
RU19990105886 |
申请日期 |
1999.03.24 |
| 申请人 |
OMSKIJ GOSUDARSTVENNYJ TEKHNICHESKIJ UNIVERSITET |
发明人 |
KIROVSKAJA I.A. |
| 分类号 |
G01N27/12;G01N25/56;(IPC1-7):G01N27/12 |
主分类号 |
G01N27/12 |
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