A chemical solution treatment equipment

摘要

This chemical treatment equipment comprises a tank (9) which can be filled with the same solution as the injected chemical solution (B); a conveyer(2) to transport the clamped substrate (A), mounted in the chemical solution (B) of tank (9); and a chemical solution injection device (10) such as a slit injection orifice (13) or spray nozzle (4) which injects the said chemical solution (B) toward to the substrate (A) to be transported with a very small spacing (L) between said jetting device and said substrate.