发明名称 SINGLE CRYSTAL PULLING UP DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a single crystal pulling up device that a crucible can be visually observed from the outside of a furnace body even when a raw material is melted and it is possible to efficiently work. SOLUTION: The single crystal pulling up device is equipped with a furnace body 10 formed in nearly closed state, a crucible 11 for supporting a raw material, which is provided in the furnace body 10, a pulling up mechanism for pulling up a single crystal from a molten liquid of the raw material P melted in the crucible 11 while growing the single crystal and a flow tube 19 which is arranged at the periphery of the single crystal being pulled up in such a manner that the flow tube is nearly concentric with the single crystal and is freely elevated and lowered. In this case, a viewing window 23 for looking the inside of the furnace body 10 is provided at the upper part of the furnace body 10, and a window part 24 is disposed in the flow tube 19 so that the inside of the crucible 11 can be visually observed through the viewing window 23 when the flow tube 19 is set at a position higher than the set position where the flow tube 19 is set when the single crystal is grown.
申请公布号 JP2001002489(A) 申请公布日期 2001.01.09
申请号 JP19990171684 申请日期 1999.06.17
申请人 MITSUBISHI MATERIALS CORP;MITSUBISHI MATERIALS SILICON CORP 发明人 KUSAMA KEIICHI;HOSODA KOJI
分类号 C30B15/00;C30B29/06;(IPC1-7):C30B15/00 主分类号 C30B15/00
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