| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the mass productivity, and to reduce the size of a device by implementing the finish polishing, cleaning and drying of a large number of works by one device. SOLUTION: In a treatment device, a loader part, a finish polishing part 2, a scrub cleaning part, a finish cleaning part, a drying part and an unloader part are integrated with each other. After a plurality of magnetic disk substrates W are finish-polished by the finish polishing part 2, they are scrub-cleaned by the scrub cleaning part, and finish-cleaned by the finish cleaning part. The magnetic disk substrates W are dried by the steam-dry type drying part. In particular, the finish polishing part 2 stores a mixture solution C of the polishing solution with an electrolyte in an effluent treatment tank 20, and a plurality of magnetic disk substrates W stored in a carrier 8 are fully immersed in the mixture solution C. A plurality of magnetic disk substrates W are polished and textured by a polishing/texturing means 30, and a specified voltage is applied to the magnetic disk substrates W by an electrolytic polishing means 40 to implement the electrolytic polishing.</p> |
