| 摘要 |
PROBLEM TO BE SOLVED: To provide the easy maintenance inspection by comprising a treatment module consisting of a housing defining a treatment chamber, a treatment part mounted in the treatment chamber to execute the predetermined process to a matter to be treated, and a plurality of nude-type turbo molecular pumps for keeping the inside of the housing under the predetermined decompressed environment and having a predetermined weight. SOLUTION: A treatment module 80 in a cluster system capable of consistently executing a plurality of processes in a semiconductor manufacturing device and the like, is provided with a susceptor 84, twelve pieces of lead-type turbo molecular pumps 88 of which a weight is regulated to be approximately 23 kgf for the sake of the maintenance inspection by one person, a pressure adjusting valve 89 and electrodes 93a, 93b. Further a high-frequency power source 90, a pulse oscillator 91 and a reaction gas supply system 92 are mounted. The power is supplied to the electrodes 93a, 93b in a state that a vacuum is applied to the treatment chamber PC by the operation of the lead-type turbo molecular pumps 88 to generate the uniform plazma, and the treatment of high quality is executed to a wafer W on the susceptor 84. |
